| 规格 mm | 测量面对基面的垂直 | 测量面平面度或直线度 | 基准平面度或直线度 | ||||||
| 精度等级um | |||||||||
| 1 | 2 | 3 | 1 | 2 | 3 | 1 | 2 | 3 | |
| 200×200 | 8 | 16 | 30 | 4 | 8 | 16 | 6 | 12 | 24 |
| 300×200 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 |
| 300×300 | 10 | 20 | 40 | 5 | 10 | 20 | 8 | 16 | 30 |
| 400×300 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 |
| 400×400 | 12 | 24 | 45 | 6 | 12 | 24 | 10 | 20 | 40 |
| 500×400 | 14 | 28 | 50 | 7 | 14 | 28 | 12 | 24 | 48 |
| 500×500 | 14 | 28 | 50 | 7 | 14 | 28 | 12 | 24 | 48 |
| 800×600 | 18 | 35 | 60 | 9 | 18 | 35 | 14 | 28 | 55 |
